diff --git a/dts/arm/atmel/samd5xx18.dtsi b/dts/arm/atmel/samd5xx18.dtsi
index ea35181935a..776b5512419 100644
--- a/dts/arm/atmel/samd5xx18.dtsi
+++ b/dts/arm/atmel/samd5xx18.dtsi
@@ -8,11 +8,13 @@
 #include <atmel/samd5x.dtsi>
 
 / {
-	flash0: flash@0 {
-		reg = <0x0 DT_SIZE_K(256)>;
-	};
+	soc {
+		flash0: flash@0 {
+			reg = <0x0 DT_SIZE_K(256)>;
+		};
 
-	sram0: memory@20000000 {
-		reg = <0x20000000 DT_SIZE_K(128)>;
+		sram0: memory@20000000 {
+			reg = <0x20000000 DT_SIZE_K(128)>;
+		};
 	};
 };
diff --git a/dts/arm/atmel/samd5xx19.dtsi b/dts/arm/atmel/samd5xx19.dtsi
index 1b3d544ab13..b7e4e6d0394 100644
--- a/dts/arm/atmel/samd5xx19.dtsi
+++ b/dts/arm/atmel/samd5xx19.dtsi
@@ -8,11 +8,13 @@
 #include <atmel/samd5x.dtsi>
 
 / {
-	flash0: flash@0 {
-		reg = <0x0 DT_SIZE_K(512)>;
-	};
+	soc {
+		flash0: flash@0 {
+			reg = <0x0 DT_SIZE_K(512)>;
+		};
 
-	sram0: memory@20000000 {
-		reg = <0x20000000 DT_SIZE_K(192)>;
+		sram0: memory@20000000 {
+			reg = <0x20000000 DT_SIZE_K(192)>;
+		};
 	};
 };
diff --git a/dts/arm/atmel/samd5xx20.dtsi b/dts/arm/atmel/samd5xx20.dtsi
index 61fbcbf658e..757d03f0542 100644
--- a/dts/arm/atmel/samd5xx20.dtsi
+++ b/dts/arm/atmel/samd5xx20.dtsi
@@ -8,11 +8,13 @@
 #include <atmel/samd5x.dtsi>
 
 / {
-	flash0: flash@0 {
-		reg = <0x0 DT_SIZE_K(1024)>;
-	};
+	soc {
+		flash0: flash@0 {
+			reg = <0x0 DT_SIZE_K(1024)>;
+		};
 
-	sram0: memory@20000000 {
-		reg = <0x20000000 DT_SIZE_K(256)>;
+		sram0: memory@20000000 {
+			reg = <0x20000000 DT_SIZE_K(256)>;
+		};
 	};
 };