diff --git a/boards/arm/nucleo_f334r8/nucleo_f334r8.dts b/boards/arm/nucleo_f334r8/nucleo_f334r8.dts
index a2c189a8f77..b4471d0476b 100644
--- a/boards/arm/nucleo_f334r8/nucleo_f334r8.dts
+++ b/boards/arm/nucleo_f334r8/nucleo_f334r8.dts
@@ -5,7 +5,7 @@
  */
 
 /dts-v1/;
-#include <st/stm32f334.dtsi>
+#include <st/f3/stm32f334X8.dtsi>
 
 / {
 	model = "STMicroelectronics STM32F334R8-NUCLEO board";
diff --git a/boards/arm/stm32373c_eval/stm32373c_eval.dts b/boards/arm/stm32373c_eval/stm32373c_eval.dts
index d6f071ddd2b..47c71dcaac1 100644
--- a/boards/arm/stm32373c_eval/stm32373c_eval.dts
+++ b/boards/arm/stm32373c_eval/stm32373c_eval.dts
@@ -5,7 +5,7 @@
  */
 
 /dts-v1/;
-#include <st/stm32f373.dtsi>
+#include <st/f3/stm32f373Xc.dtsi>
 
 / {
 	model = "STMicroelectronics STM32373C-EVAL board";
diff --git a/boards/arm/stm32f3_disco/stm32f3_disco.dts b/boards/arm/stm32f3_disco/stm32f3_disco.dts
index 5a34c0fd88e..b2dab4b436e 100644
--- a/boards/arm/stm32f3_disco/stm32f3_disco.dts
+++ b/boards/arm/stm32f3_disco/stm32f3_disco.dts
@@ -5,7 +5,7 @@
  */
 
 /dts-v1/;
-#include <st/stm32f303.dtsi>
+#include <st/f3/stm32f303Xc.dtsi>
 
 / {
 	model = "STMicroelectronics STM32F3DISCOVERY board";
diff --git a/dts/arm/st/stm32f3-pinctrl.dtsi b/dts/arm/st/f3/stm32f3-pinctrl.dtsi
similarity index 100%
rename from dts/arm/st/stm32f3-pinctrl.dtsi
rename to dts/arm/st/f3/stm32f3-pinctrl.dtsi
diff --git a/dts/arm/st/stm32f3.dtsi b/dts/arm/st/f3/stm32f3.dtsi
similarity index 97%
rename from dts/arm/st/stm32f3.dtsi
rename to dts/arm/st/f3/stm32f3.dtsi
index 2e778c61252..b81839346aa 100644
--- a/dts/arm/st/stm32f3.dtsi
+++ b/dts/arm/st/f3/stm32f3.dtsi
@@ -4,9 +4,8 @@
  * SPDX-License-Identifier: Apache-2.0
  */
 
-#include <st/stm32f3-pinctrl.dtsi>
+#include <st/f3/stm32f3-pinctrl.dtsi>
 #include <arm/armv7-m.dtsi>
-#include <st/mem.h>
 #include <dt-bindings/clock/stm32_clock.h>
 #include <dt-bindings/i2c/i2c.h>
 #include <dt-bindings/gpio/gpio.h>
@@ -26,7 +25,6 @@
 	sram0: memory@20000000 {
 		device_type = "memory";
 		compatible = "mmio-sram";
-		reg = <0x20000000 DT_SRAM_SIZE>;
 	};
 
 	soc {
@@ -42,7 +40,6 @@
 			flash0: flash@8000000 {
 				compatible = "soc-nv-flash";
 				label = "FLASH_STM32";
-				reg = <0x08000000 DT_FLASH_SIZE>;
 			};
 		};
 
diff --git a/dts/arm/st/stm32f303.dtsi b/dts/arm/st/f3/stm32f303.dtsi
similarity index 94%
rename from dts/arm/st/stm32f303.dtsi
rename to dts/arm/st/f3/stm32f303.dtsi
index 299859663f4..98eff907ce6 100644
--- a/dts/arm/st/stm32f303.dtsi
+++ b/dts/arm/st/f3/stm32f303.dtsi
@@ -4,14 +4,9 @@
  * SPDX-License-Identifier: Apache-2.0
  */
 
-#include <st/stm32f3.dtsi>
+#include <st/f3/stm32f3.dtsi>
 
 / {
-	ccm0: memory@10000000 {
-		compatible = "st,stm32-ccm";
-		reg = <0x10000000 DT_CCM_SIZE>;
-	};
-
 	soc {
 		i2c2: i2c@40005800 {
 			compatible = "st,stm32-i2c-v2";
diff --git a/dts/arm/st/f3/stm32f303Xc.dtsi b/dts/arm/st/f3/stm32f303Xc.dtsi
new file mode 100644
index 00000000000..e520df3b6a7
--- /dev/null
+++ b/dts/arm/st/f3/stm32f303Xc.dtsi
@@ -0,0 +1,27 @@
+/*
+ * Copyright (c) 2018 Linaro Limited
+ *
+ * SPDX-License-Identifier: Apache-2.0
+ */
+
+#include <mem.h>
+#include <st/f3/stm32f303.dtsi>
+
+/ {
+	ccm0: memory@10000000 {
+		compatible = "st,stm32-ccm";
+		reg = <0x10000000 DT_SIZE_K(8)>;
+	};
+
+	sram0: memory@20000000 {
+		reg = <0x20000000 DT_SIZE_K(40)>;
+	};
+
+	soc {
+		flash-controller@40022000 {
+			flash0: flash@8000000 {
+				reg = <0x08000000 DT_SIZE_K(256)>;
+			};
+		};
+	};
+};
diff --git a/dts/arm/st/stm32f334.dtsi b/dts/arm/st/f3/stm32f334.dtsi
similarity index 93%
rename from dts/arm/st/stm32f334.dtsi
rename to dts/arm/st/f3/stm32f334.dtsi
index 051659b259f..81a7a8f7a19 100644
--- a/dts/arm/st/stm32f334.dtsi
+++ b/dts/arm/st/f3/stm32f334.dtsi
@@ -4,7 +4,7 @@
  * SPDX-License-Identifier: Apache-2.0
  */
 
-#include <st/stm32f3.dtsi>
+#include <st/f3/stm32f3.dtsi>
 
 / {
 	soc {
diff --git a/dts/arm/st/f3/stm32f334X8.dtsi b/dts/arm/st/f3/stm32f334X8.dtsi
new file mode 100644
index 00000000000..66a9c4ddc7b
--- /dev/null
+++ b/dts/arm/st/f3/stm32f334X8.dtsi
@@ -0,0 +1,27 @@
+/*
+ * Copyright (c) 2018 Linaro Limited
+ *
+ * SPDX-License-Identifier: Apache-2.0
+ */
+
+#include <mem.h>
+#include <st/f3/stm32f334.dtsi>
+
+/ {
+	ccm0: memory@10000000 {
+		compatible = "st,stm32-ccm";
+		reg = <0x10000000 DT_SIZE_K(4)>;
+	};
+
+	sram0: memory@20000000 {
+		reg = <0x20000000 DT_SIZE_K(12)>;
+	};
+
+	soc {
+		flash-controller@40022000 {
+			flash0: flash@8000000 {
+				reg = <0x08000000 DT_SIZE_K(64)>;
+			};
+		};
+	};
+};
diff --git a/dts/arm/st/stm32f373.dtsi b/dts/arm/st/f3/stm32f373.dtsi
similarity index 99%
rename from dts/arm/st/stm32f373.dtsi
rename to dts/arm/st/f3/stm32f373.dtsi
index e3bcb1a6bef..115afe4a96a 100644
--- a/dts/arm/st/stm32f373.dtsi
+++ b/dts/arm/st/f3/stm32f373.dtsi
@@ -4,7 +4,7 @@
  * SPDX-License-Identifier: Apache-2.0
  */
 
-#include <st/stm32f3.dtsi>
+#include <st/f3/stm32f3.dtsi>
 
 / {
 	soc {
diff --git a/dts/arm/st/f3/stm32f373Xc.dtsi b/dts/arm/st/f3/stm32f373Xc.dtsi
new file mode 100644
index 00000000000..7a875091b53
--- /dev/null
+++ b/dts/arm/st/f3/stm32f373Xc.dtsi
@@ -0,0 +1,22 @@
+/*
+ * Copyright (c) 2018 Linaro Limited
+ *
+ * SPDX-License-Identifier: Apache-2.0
+ */
+
+#include <mem.h>
+#include <st/f3/stm32f373.dtsi>
+
+/ {
+	sram0: memory@20000000 {
+		reg = <0x20000000 DT_SIZE_K(32)>;
+	};
+
+	soc {
+		flash-controller@40022000 {
+			flash0: flash@8000000 {
+				reg = <0x08000000 DT_SIZE_K(256)>;
+			};
+		};
+	};
+};